radio frequency sensor

Temperature sensor of Cr metal membrane made by radio frequency plasma chemical vapor deposition is discussed.

采用等离子体溅射方法制备了Cr金属薄膜式温度传感器。

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The key technologies of The Internet of Things include: radio frequency identification technology, wireless sensor networks, embedded technology, nano-and micro-electromechanical systems, distributed information management technology.

物联网涉及的关键技术主要有：射频识别技术、无线传感网、嵌入式技术、纳米与微机电系统、分布式信息管理技术。

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PS has many unique properties such as enormous intermal surface, high resistance ratio, high chemical activity, etc. PS has been developed in many application fields including optoelectronics, thermoelectric materials, sensor, microwave/ radio frequency microelectronics, biomedicine, etc.

多孔硅由于具有大的比表面、高电阻率、高化学活性等性能，在光电子、热电材料、传感器、微波/射频微电子学、和生物医学等许多领域获得了广泛的应用。

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